- Source: EDN Asia Newsletter, By: Kirtimaya Varma, Date: 01, Oct, 2008
While designers move toward 32nm, two reports from IMEC should be of special interest for them. The first is the end of the road for immersion lithography. This is rather disappointing, because high-index immersion lithography using non-water fluids between the optical lens and the wafer was designed to push 193nm immersion lithography toward the 32nm node. Its elimination from the race for the next-generation lithography tools has not come suddenly. Designers had found that in deep nanometrics immersion lithography was behind the roadmap. But now it is confirmed that this lithography has reached its limits.
LITHOGRAPHY OPTIONS: The two lithography options being developed for 32nm and possibly beyond are double patterning and EUV. EUV technology is still years away and is expected to mature only in the middle of the next decade. This leaves double patterning to bridge the gap between immersion and EUV lithographies. Most designers agree that double patterning will be the best option for the 32nm half pitch during early next decade, and some hope that EUV will take over at 22nm half pitch. However, there is no consensus on which of the several double patterning approaches using the existing 193nm immersion toolset will prevail. For one thing, all the present double patterning methods entail huge extra costs because of extra process steps involved. IMEC is conducting a study on various double patterning methods with a view to assess the feasibility and cost-effectiveness of various processes and to validate the most promising ones in terms of cost, implementation, and process controllability, and is developing alternate process flows that reduces the cost-of-ownership by eliminating the intermediate etch step and replacing it with a process step in the litho track. The method IMEC has used to eliminate the extra etch step is through freezing the resist after the first exposure. The freezing material, developed by JSR Corporation and compatible with the lithography hardware, prevents the resist from expanding or contracting, so that when the second resist layer is added, the two do not interact. Besides, the freezing material changes the properties of the first resist layer to make it non-soluble in the second resist layer solvent. IMEC is developing this technique in collaboration with resist supplier and is working on improvements of the process conditions, process window, line-edge roughness, overlay, defectivity, and etch performance. With EUV lithography still far away, it is not known how will EUV impact the cost of a design? Today no known EUV radiation source produces sufficient power. With costs going through the roof, some designers are wary of being too optimistic about EUV and believe that double patterning will not stop at 32nm and will extend to nodes beyond. In this connection it is important to note that IMEC has completed the site acceptance tests for ASMLs Alpha-Demo EUV tool that has successfully patterned the contact level of a 32nm SRAM cell using EUV.
DIELECTRIC BREAKTHROUGH: Yet another important announcement IMEC made is its progress on simplified high-K/metal gate process for 32nm node. K has been a matter of concern ever since designs reached 90nm. It is too early to say whether a final solution has emerged, but IMEC reports improved performance for its planar CMOS using hafnium-based high-K dielectrics and tantalum-based metal gates for the 32nm CMOS node. IMEC has simplified its high-K/metal gate process by decreasing the number of process steps from 15 to 9.
IMEC also claims to have simplified the process complexity from dual-metal dual-dielectric to single-metal dual-dielectric by using soft-mask processes and wet removal chemistry. The process reduces the complexity by 40 percent or 6 steps compared to dual-metal dual-dielectric, while allowing simpler gate-etch profile control and offering better prospects for scaling. IMEC works with its core 32nm CMOS partners, including Infineon, Qimonda, Intel, Micron, NXP, Panasonic, Samsung, STMicro, TI, TSMC , Elpida and Hynix.